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Vacuum Chambers and UHV Chambers
Concept Vacuum are custom vacuum chamber design specialists. Mount everything you need where you need it and get your process or experiment underway.
Concept Vacuum have a range of standard vacuum chamber templates which we use to reduce design time and keep cost to a minimum. We supply high vacuum chambers, UHV chambers and all the accessories.
Chambers are available in stainless steel, acrylic, aluminium and Mu-metal materials. All chambers are 100% inspected and helium leak tested.
Concept Vacuum typically supply vacuum chambers on 6 week delivery, but this can vary depending on demand so we will always quote a lead time that we are 100% confident that we can achieve when you make an enquiry.
TRADE DISCOUNT
Be sure to ask for a discount if you are an O.E.M. or reseller
Tags: deposition chamber, vacuum chamber, vacuum vessel
Box Vacuum Chambers
Box Chambers
Suitable for high vacuum use, our standard box chambers are constructed from welded stainless steel 304L plates with an aluminium alloy door. The door is sealed with an O-ring located in a dovetail O-Ring groove. These vacuum chambers can be easily customised to suit your application.
All our chambers are supplied cleaned to UHV standards and are helium leak tested.
Options
- Your choice of shape and size
- 304L, 316, 316L or 316LN chamber construction
- Additional straight, angled or zero length ports
- Left or right hand door opening
- Windows with a choice of optics
- Transparent acrylic door
- Water-cooling (trace or double wall)
- Internal stand-offs, bosses and mounting points
- RF shielding
- Powder coated steel or aluminium profile frames
- Heaters and manipulators
- Gauges, pumps and feedthroughs
Cylindrical Vacuum Chambers
Cylindrical Chambers
Suitable for high vacuum or ultra-high vacuum use (depending on flange selection), our cylindrical chambers are constructed from stainless steel 304L tube. The chamber shown in the image, is Ø300mm (Ø12") x 800mm and has two large 300 x 90mm windows for observing reactions. The ports in the top are used for creating the desired atmosphere and for sample taking. Cylindrical vacuum chambers can be customised to suit your application.
All our chambers are supplied cleaned to UHV standards and are helium leak tested.
Options
- Your choice of shape and size
- 304L, 316, 316L or 316LN chamber construction
- Additional straight, angled or zero length ports
- Windows with a choice of optic materials
- Water-cooling (trace or double wall)
- Internal stand-offs and bosses
- RF shielding
- Frames in powder coated steel or aluminium profile
- Heaters and manipulators
- Gauges, pumps and feedthroughs
Water Cooled Vacuum Chambers
Water Cooling
Concept Vacuum supply water cooled chamber for temperature control. We can supply with your choice of connector and hoses.
Options
Typically we offer three solutions:
Double Wall: Uses dual chamber walls with channels and barriers to direct water flow.
Machined Trace: A channel is machined into the chamber wall, and a matching profile cover is welded onto the wall to create the cooling path.
Welded Trace: A channel is welded onto the surface of the chamber to create the cooling path.
Each method offers unique benefits depending on the application. Concept Vacuum are available to help you find the best solution for your application.
Load Lock Chambers
Fast-Entry Access Load Lock Chambers
Reduce process time and avoid admitting moisture and oxygen into your process chamber by adding a load lock to your vacuum system. Load lock or fast-entry chambers allow quick sample changing while the main process chamber remains under vacuum. A crucial addition to UHV chambers.
Key features and benefits:
- Save on pump down time and increase productivity
- Improve film quality
- Enable additional pre and post coating processes
- Fully customisable
- Delivered on-time and cleaned to UHV standards
Options:
- Manual and pneumatically operated gate valves
- Gas inlet valves
- Transfer arms
- Substrate heating and cooling
- Plasma cleaning
- Wide range pressure gauges (atm. to 10⁻⁸ mbar)
- Substrate platens from Ø2” to Ø8” available in stainless steel, Inconel, ceramic, graphite, high purity silicon carbide (SiC³) coated graphite or molybdenum
- Dry vacuum pumps (turbomolecular and scroll)
DN100CF Load Lock Chamber
Constructed from stainless steel 304L. Other materials available on request.
Fully customisable.
Click the image to view drawing.
DN160CF Load Lock Chamber
DN160CF Load Lock Chamber
DN160CF Load Lock Chamber
Constructed from stainless steel 304L. Other materials available on request.
Fully customisable.
Click the image to view drawing.
DN200CF Load Lock Chamber
DN160CF Load Lock Chamber
DN160CF Load Lock Chamber
Constructed from stainless steel 304L. Other materials available on request.
Fully customisable.
Click the image to view drawing.