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      • Stock Components
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      • Feedthroughs
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  • Home
  • Products & Services
    • Vacuum Systems
    • Vacuum Chambers
    • Vacuum Pumps
    • Manipulation
    • Substrate Heating
    • Vacuum Bake Out
    • Custom Hardware
    • Vacuum Viewports
    • Pressure Control
    • Stock Components
    • Consumables
    • Feedthroughs
    • Consultancy
    • Deposition
    • Special Materials
    • Training Courses
  • Technical Resources
    • Materials
    • Vacuum System Basics
    • Vacuum Pressure
    • Leak Rates
    • Downloads
  • Contact
  • Gallery
  • Testimonials
  • About
  • News

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Vacuum Heating

Ø2" Sample heater

Substrate Heating

Concept Vacuum supply vacuum heaters and deposition stages for research and process heating equipment for industry. We have a range of retainer and clip options for securing substrates and wafers, and materials to suit all processes and temperature ranges. Our heaters are designed to provide precise and repeatable processes, with features that include:


  • Stage options
  • High precision temperature controllers
  • hot zones from Ø15mm up to Ø350mm
  • Rectangular heaters
  • DC or RF biasing
  • Water cooling
  • Internal thermocouples
  • Heating up to 1600°C
  • Built and tested in the UK.


Contact Concept Vacuum today to learn more about our  heating solutions and how they can help you with your next project. 


Tags: deposition stage, heater stage, substrate heater, sample heater, sputtering, thermal evaporation, pulsed laser deposition, LCVD, ALCVD, HPCVD, MOCVD, ALD

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Vacuum Furnaces

Concept Vacuum offer a range of standard or bespoke vacuum furnaces.  


  • 1 cc capacity up to 3500 cc capacity
  • Manual, semi-automatic or fully automatic options
  • Control of process gasses
  • Available in a variety of sizes and materials


Contact Concept Vacuum today to learn more about vacuum furnaces and how they can help you with your process or research.


Vacuum furnace

Vacuum Heating Solutions

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