Motion & Manipulation

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Concept Vacuum design and build deposition stages for a wide range of physical vapour deposition (PVD) and chemical vapor deposition (CVD) vacuum system processes.  Stages can be specified for high vacuum or ultra-high vacuum (UHV) applications. Our stages are designed to provide precise and repeatable deposition of materials, with features that include:

• Z-shift (edge welded bellows) and sample rotation
• High precision position control
• Accurate temperature control (heating or cooling)
• DC or RF biasing
• Connection solutions for rotating equipment
• Software integration
• Liquid Nitrogen (LN2) cooled or water cooled
• Heated substrate options up to 1600°C
• Cooled substrate options down to -185°C 
• Built and tested in the UK.

Concept vacuum design material deposition stages to meet your specific needs, from small benchtop systems to large production systems. Our team of experts is here to help you choose the right stage for your application and get your system moving.

Deposition stages are typically supplied with motors or pneumatic actuators so that the system can be fully tested before it is delivered. Manual or semi-automated solutions are also available. 

Contact Concept Vacuum today to learn more about our material deposition stages and how they can help you with your next project. 

Tags: deposition stage, heater stage, cold stage, cold finger, cryogenics, sputtering, thermal evaporation, E-beam evaporation, Electron-beam evaporation, pulsed laser deposition, LCVD, ALCVD, HPCVD, MOCVD

Concept Vacuum design and manufacture rotary solutions for ultra-high vacuum system applications. Our magnetically coupled rotary feedthroughs are bakeable to 150°C.  They are ideal for enabling rotary motion in ultra-high vacuum (UHV) systems for vacuum coating processes. They are used in chemical vapor deposition (CVD) and physical vapor deposition (PVD) applications.

• Hollow shaft option for electrical or fluid admittance
• Solid shaft and angle-adjustable options
• Custom solutions
• Smooth rotary motion with no backlash under low loads
• Laser etched scales
• Available on CF flanges
• Manual or integrated with motors or pneumatic actuators
• Leak tested to < 1×10 ⁻ ¹¹ mbar.L/s (He)
• Reliable performance 
• Easy to install and maintain

Contact Concept Vacuum today to learn more about our magnetically coupled rotary feedthroughs and how they can help you with your vacuum chamber needs.

 A Ferrofluid rotary vacuum feedthrough uses a magnetic fluid and an applied magnetic field to transmit rotation into a high vacuum or ultra-high vacuum system. Magnetically coupled, the feedthroughs are bakeable to 150°C.  They are ideal for enabling rotary motion in high vacuum and ultra-high vacuum (UHV) systems. They are used in chemical vapor deposition (CVD) and physical vapor deposition (PVD) applications.

• Long lifetime compared with dynamic O-ring seals 
• Suitable for high speeds
• Custom solutions
• No leakage -  hermetically sealed
• Solid or hollow shaft
• Available on flanges or with thread mounts
• Manual or integrated with motors or pneumatic actuators
• Leak tested to < 1×10 ⁻ ¹¹ mbar.L/s (He) (CF mounted)
• Reliable performance 
• Easy to install and maintain

Contact Concept Vacuum today to learn more about Ferrofluid  rotary feedthroughs and how they can help you with your vacuum chamber needs.

Concept Vacuum supply automated solutions utilising pneumatics or electric motors to help you improve your efficiency, productivity, and quality.  Our team of experienced engineers can design and build custom vacuum systems to meet your specific needs.  

• Increase efficiency and productivity
• Reduce labour costs
• Improve product quality
• Enhance safety
• Reduced waste

 If you are interested in learning more about automation in vacuum applications, please contact us today for a free consultation. Our team of experts will be happy to discuss your specific needs and recommend the best solutions for your application.